Godzilla: Tokyo S.O.S. (2003)
Godzilla: Tokyo S.O.S., released in Japan as Godzilla × Mothra × Mechagodzilla: Tokyo SOS, is a 2003 science fiction kaiju film directed by Masaaki Tezuka. It was the twenty-seventh film to be released in the Godzilla series. It is the twelfth film to feature Mothra, the second film to feature Kamoebas, and the fifth and latest film to feature Mechagodzilla. Unlike the Millennium Series and like Godzilla vs. Megaguirus, the film takes place in continuity with other Toho films, notably Godzilla, Mothra, War of the Gargantuas, Space Amoeba and its predecessor, Godzilla Against Mechagodzilla.
More at Wikipedia.